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Yes. BIST is an implementation of these concepts. With the latest component, CapSense V7.0, there are several test that are available such as
-checking RAM structure integrity,
-RAM widget integrity,
-checking sensor short to ground, VDD and other sensors,
-parasitic capacitance of sensors and shield,
-External capacitors measurements.
All these tests can be performed by running the CapSense_RunSelfTest API. Please note that the "Enable self-test library" option must be enabled for these APIs to be active.
You can refer the latest component datasheet for more information.